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SiC

Silicon Carbide

HANA Materials, growing with technology and future, We will head toward the customer-centric management for Silicon Carbide products.

SiC (Silicon Carbide) is a strong covalent combination of Si and C and has excellent material properties including good hardness and strength, high heat resistance, high corrosion resistance. Due to its excellent material properties, it is widely being applied to various industries such as semiconductors, LED, solar PV, aerospace, treatment on nuclear fusion by-products, and energy that requires the high temperature and clean environment.

We manufacture SiC Bulk products with CVD (Chemical Vapor Deposition) SiC coated product manufacturing and specialized CVD method.

SiC Coating

Description

Substrate : graphite
High thermal purification
CVD coating

Applications

LED MOCVD Susceptor - 2, 4, 6” available
H/Z parts for CZ growing

Specification

Properties

Value

Purity (%)

≥ 99.9999

Density (g/cm3)

3.20

shore hardness

52

Thermal Expansion coefficient (10-6/K)

4.5/p>

Thermal Conductivity (W/mK)

214

Coating Thickness (um)

20-250 ± 10%

CVD-SiC Bulk

Description

CVD bulk selective
High corrosion resistance
Resistivity control

Applications

Dry etcher for semiconductor process

Specification

Properties

Value

Density (g/cm³)

3.21

Flexural strength (MPa)

420

Vickers hardness (Hv)

3,100

Thermal conductivity (W/mK)

320

Resistivity (Ω-cm)

0.2~10, >500, <0.02

개인정보처리방침

HANA Materials Inc. /
50, 3gongdan 3-ro, Seobuk-gu, Cheonan-si, Chungcheongnam-do / TEL 041-410-1015

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